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Design Change / Discontinuation Information

External Vacuum Controller

External Vacuum Controller VJP

RoHS2 Compliant

By adding a pressure adjustment function to the conventional blow-off flow adjustment function, workpieces can be prevented from being blown away.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa

Options

  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
CAD Catalog Instruction Manuals

External Vacuum Controller

External Vacuum Controller VXP & VXPT

RoHS2 Compliant

Pursuing responsiveness of suction solenoid valve to the fastest limit and realized the high cycle of vacuum system.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa

Options

  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
CAD Catalog Instruction Manuals

External Vacuum Controller

External Vacuum Controller VQP

RoHS2 Compliant

31.5 mm-wide External Vacuum Controller is designed to optimize the control of large vacuum flows.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa

Options

  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
CAD Catalog Instruction Manuals

External Vacuum Controller

External Vacuum Controller VZP

RoHS2 Compliant

Small in size and lightweight. External Vacuum Controller with bundled wiring dedicated to manifold mount.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa
CAD Catalog Instruction Manuals

External Vacuum Controller

External Vacuum Controller VNP

RoHS2 Compliant

External Vacuum Controller suitable for applications requiring space-saving installation and high-cycle operation.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0 to 0.55 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa
CAD Catalog Instruction Manuals

External Vacuum Controller

External Vacuum Controller VIP

RoHS2 Compliant

Built-in flow sensor type (Industry's first) is added to the lineup. Conventional pressure-sensor-equipped type and type without pressure sensor are also available.
Recommended for semiconductor-related equipment, such as chip mounters and handlers, and vacuum transfer equipment for small workpieces.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-90 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa
CAD Catalog Instruction Manuals

External Vacuum Controller

External Vacuum Controller VJP (-S3 spec.)

RoHS2 Compliant

External Vacuum Controller for secondary battery manufacturing processes.
Pressure adjusting function is added to conventional blow-off flow adjusting function.
This prevents workpieces from being blown away.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa
  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
CAD Catalog Instruction Manuals Design Change / Discontinuation Information

External Vacuum Controller

External Vacuum Controller VXP (-S3 spec.)

RoHS2 Compliant

External Vacuum Controller for secondary battery manufacturing processes.
The response characteristics of the supply valve are maximized to achieve a high-cycle vacuum system.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa
  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
CAD Catalog Instruction Manuals

External Vacuum Controller

External Vacuum Controller VQP (-S3 spec.)

RoHS2 Compliant

External Vacuum Controller for secondary battery manufacturing processes.
31.5 mm-wide External Vacuum Controller is designed to optimize the control of large vacuum flows.

Fluid medium
Air (JIS B 8392-1: Class 1.2.1 to 2.4.3 compliant), Vacuum
Operating pressure range
0.3 to 0.7 MPa
Operating vacuum range
-100 to 0 kPa
Operating temp. range
5 to 50 ℃ (No freezing)
Operating humidity range
35 to 85% RH (No dew condensation)
Vibration/Impact resistance
50 m/s2 max. / 150 m/s2 max.
Protection rating
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05 MPa
Proof pressure (Vacuum circuit)
0.2 MPa
  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
CAD Catalog Instruction Manuals