Vacuum Pad

Vacuum Pad Oval Type (-S3 spec.)

RoHS2 Compliant

Best suitable for substrate or long work like semiconductor.

  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.

Advantages

Best suitable for substrate or long work like semiconductor.

Best suitable for substrate or long work like semiconductor.

Wide selection of pad sizes, materials and holder types.

Stroke length of spring type holder can be selected.

Conventional long stroke holder (with cover) is integrated into VPC or VPD.
Stroke:6, 10, 15 and 20mm

Conventional long stroke holder (without cover) is renewed as VPOC or VPOD.
Stroke:20, 30, 40 and 50mm

The pad holder requiring for applications of "No copper alloy" and "Low-level ozone resistance" is available.

-S3 spec.:Non copper alloy is used for metal parts and HNBR or FKM is used for seal materials.

DLC. coating type uses a special coating on the surface of the vacuum pad to prevent sticking to the workpiece.

DLC. coating type significantly improves slipperiness. Effective in reducing adsorption marks and preventing sticking of lightweight and thin workpieces.

Specifications

Pad material

Material Silicone rubber, Urethane rubber, Fluoro rubber, Conductive silicone rubber, Conductive butadiene rubber (Low resistance), HNBR, EPDM

*1. The Conductive silicone rubber is a silicon rubber capable of releasing static electricity. (Volume resistance:105Ω·cm or less)

*2. The material of Conductive butadiene rubber (low resistance) is a butadiene rubber (Volume resistance:200Ω·cm or less)

*3. Pad size 2x4 and 3.5x7mm are not available with Conductive butadiene rubber (Low resistance type). Pad size 4x30mm is not available with Urethane rubber (U) and Fluoro rubber (F).

Holder type

Fixed type, Top port VPA(Standard)/VPAE
Fixed type, Side port VPMB(Mini)/VPB(Standard)/VPBE
Spring type, Top port VPC(Standard)
Spring type, Side port VPMD(Mini)/VPD(Standard)
Spring type, Direct mount VPF

Port size

Pad size(X x Y)(mm)

2x4, 3.5x7,
4x10, 4x20, 4x30,
5x10, 5x20, 5x30,
6x10, 6x20, 6x30,
8x20, 8x30

Port tube dia.

Push-in fitting (mm) φ4, φ6
Barb fitting (tube O.D. x I.D. (mm) φ3×φ2, φ4×φ2.5, φ6×φ4

* Available port size differs depending on the pad size.

Port thread size

Metric female thread M5×0.8, M6×1
Male thread M14×1

Theoretical Suction Force Graph

Ordering Information

Model designation (example)

Detailed Safety Instructions

Warning

1.When installing the pad frame, check the configuration diagram of the oval pad, use a tool that does not damage the frame, and tighten with a torque of 0.27 to 0.33 Nm, and make sure there is no loosening.

Caution

1.The adapter for oval pad is not conductive. When using a vacuum pad made of a conductive material, take measures to allow electricity to escape directly from the pad rubber.

Frequently Asked Questions for Vacuum Pad Series

Inquiries about this product

It is also possible to suggest products suitable for various conditions such as applications and functions. Please feel free to contact us or visit the nearest sales office.

The following are frequently asked questions. Please check before making inquiries.