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External Vacuum Controller
External Vacuum Controller VJP
Pressure adjusting function is added to conventional blow-off flow adjusting function.
It enables to prevent works from being blown away.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
Options
-
No copper-based metallic material is used in flow paths
-
HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
External Vacuum Controller
External Vacuum Controller VXP & VXPT
The response characteristics of supply valve is maximized to realize a high-cycle vacuum system.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
Options
-
No copper-based metallic material is used in flow paths
-
HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
External Vacuum Controller
External Vacuum Controller VQP
31.5mm wide vacuum unit is designed to optimize the control of large vacuum flows.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
Options
-
No copper-based metallic material is used in flow paths
-
HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
External Vacuum Controller
External Vacuum Controller VZP
Small in size and lightweight. External Vacuum Controller with bundled wiring dedicated to manifold mount.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
External Vacuum Controller
External Vacuum Controller VNP
External Vacuum Controller best suitable for the fields requires space-saving and high speed.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0~0.55MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
External Vacuum Controller
External Vacuum Controller VIP
Built-in flow sensor type (Industry's first) is added to the lineup. Conventional pressure sensor mount type and no pressure sensor type are also prepared.
Recommendable to semiconductor related equipment (chip mounter and handler) and vacuum transfer equipment for miniature work piece.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -90~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
External Vacuum Controller
External Vacuum Controller VJP (-S3 spec.)
Pressure adjusting function is added to conventional blow-off flow adjusting function.
It enables to prevent works from being blown away.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
-
No copper-based metallic material is used in flow paths
-
HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
External Vacuum Controller
External Vacuum Controller VXP(-S3 spec.)
The response characteristics of supply valve is maximized to realize a high-cycle vacuum system.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
-
No copper-based metallic material is used in flow paths
-
HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
External Vacuum Controller
External Vacuum Controller VQP (-S3 spec.)
31.5mm wide vacuum unit is designed to optimize the control of large vacuum flows.
- Fluid medium
- Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
- Operating pressure range
- 0.3~0.7MPa
- Working vacuum range
- -100~0kPa
- Operating temp. range
- 5~50℃ (No freezing)
- Operating humidity range
- 35~85%RH (No dew condensation)
- Vibration/Impact resistance
- Max. 50m/s2 / Max. 150m/s2
- Protective structure
- Equivalent to IEC IP40
- Lubrication
- Not required
- Proof pressure (Air supply circuit)
- 1.05MPa
- Proof pressure (Vacuum circuit)
- 0.2MPa
-
No copper-based metallic material is used in flow paths
-
HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.