Vacuum Accessories

Vacuum Filter VFL

RoHS2 Compliant

Vacuum filter for vacuum pumps and large flow vacuum generators.

  • PBT is used for the main resin parts. PBT: A standard resin material that is ideal for general environments.
  • Aluminum is used for the main metal parts.
Seal rubber
  • NBR is used for the seal rubber material. NBR: A material generally used as a sealing material. Please note that it is inferior in ozone resistance.


Vacuum filter for vacuum pumps and large flow vacuum generators.

Flow rate : 360L/min[ANR]. Large Flow Vacuum Filter.

The filter removes dust particles sucked with air, and protects a vacuum generator or vacuum pump.

Four types of filtration accuracy can be selected according to applications.

Filtration accuracy : 1μm, 5μm, 10μm, 200μm

Three types of connections can be selected.

Taper pipe female thread, Parallel pipe female thread and Push-in fitting are available.

Resin body realized light weight.


Fluid medium Air
Operating pressure range -101~0kPa
Filtering accuracy(*1) 1,5,10,200μm (Trapping efficiency : 95%)
Operating temp. range 0~60℃(No freezing)
Filter area 64.4cm2
Processing flow rate(*2) 360L/min[ANR]
Bowl capacity 90cm3
Blow-off pressure(*3) 0.1MPa or less

Port size

Tube dia.

mm size(mm) φ10, φ12, φ16

Thread size

Taper pipe female thread Rc3/8, Rc1/2, Rc3/4
Parallel pipe female thread G3/8, G1/2, G3/4

Characteristic Graph


Type & Price list

Option & Maintenance items

Vacuum Filter VFLFilter element

Filter element for maintenance of Vacuum Filter VFL.

Vacuum Filter VFL

Detailed Safety Instructions


1.Since this product is not explosion-proof, do not apply positive pressure other than instantaneous pressure for blow-off (vacuum breaking). There is a risk of injury to the human body due to damage of the product.

2.The bowl is made of polycarbonate. Do not use the chemicals or use in those atmospheres listed in the following Table. There is a risk of injury to the human body due to damage to the bowl.


1.Perform regular maintenance and inspection of the filter element. Clogging of the element may result in poor performance or trouble. When replacing the element, be sure to understand "How to remove the dust in bowl and replace a filter element", and make sure that the internal pressure of the filter is released to atmospheric pressure before replacement to ensure safety.

2.After removing the dust and replacing the element, make sure that the bowl is securely fixed and that there is no vacuum leakage.

3.When connecting the piping, check the outline dimentional drawing and the arrows for the air flow direction on the product. Reverse connection does not satisfy the filter function.

4.Drainage (dust or moisture) accumulation must be kept below the "MAX.DRAIN LEVEL" indicated on the bowl. The airflow can wind up the drainage and significantly reduce the life of the filter element.

5.When tightening a fitting to each port of this product, grasp the hexagonal-column of each port with an appropriate tool and tighten it so that it does not rotate together. For the tightening torque, refer to the torque in the following table and tighten so that there is no leakage.

6.When installing and fixing the product, mount the bowl downward and vertically.

7.The fixing screws for the bracket and the product must be regularly retightened.

Inquiries about this product

It is also possible to suggest products suitable for various conditions such as applications and functions. Please feel free to contact us or visit the nearest sales office.

The following are frequently asked questions. Please check before making inquiries.