Vacuum Pad

Vacuum Suction Cup Oval Type

RoHS2 Compliant

Best suitable for substrate or long work like semiconductor.


  • No copper-based metallic material is used in flow paths
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.


Best suitable for substrate or long work like semiconductor.

Best suitable for substrate or long work like semiconductor.

Wide selection of pad sizes, materials and holder types.

Pad size:13sizes.
Pad material:9types.
Holder type:14types.

Stroke length of spring type holder can be selected.

Conventional long stroke holder (with cover) is integrated into VPC or VPD.
Stroke:6, 10, 15 and 20mm

Conventional long stroke holder (without cover) is renewed as VPOC or VPOD.
Stroke:20, 30, 40 and 50mm

Low dust emission type is newly introduced for spring type holder.

Lower dust emission compared to conventional spring type holder.

Noise level:Realizing low noise with 45dB.

Connectable to all pad sizes.

Stroke:5, 10, 15mm are available.

The pad holder requiring for applications of "No copper alloy" and "Low-level ozone resistance" is available.

-S3 spec.:Non copper alloy is used for metal parts and HNBR or FKM is used for seal materials.


Pad material

Material Nitrile rubber, Silicone rubber, Urethane rubber, Fluoro rubber, Conductive silicone rubber, Conductive butadiene rubber (Low resistance), Conductive NBR (Low resistance), HNBR, EPDM

*1. The Conductive silicone rubber is a silicon rubber capable of releasing static electricity. (Volume resistance:105Ω·cm or less)

*2. The material of Conductive butadiene rubber (low resistance) is a butadiene rubber (Volume resistance:200Ω·cm or less)

*3. Pad size 2x4 and 3.5x7mm are not available with Conductive butadiene rubber (Low resistance type). Pad size 4x30mm is not available with Urethane rubber (U) and Fluoro rubber (F).

*4. The material of Conductive NBR (low resistance) is a nitrile rubber (Volume resistance:200Ω·cm or less)

*5. Nitrile rubber (N) and Conductive NBR (Low resistance) (NE) are not suitable for use with ozone environment.

Holder type

Fixed type, Top port VPMA(Mini)/VPA(Standard)
Fixed type, Side port VPMB(Mini)/VPB(Standard)
Spring type, Top port VPMC(Mini)/VPC(Standard)/VPOC(No cover)/VPLFC(Low dust emission)
Spring type, Side port VPMD(Mini)/VPD(Standard)/VPOD(No cover)
Spring type, Direct mount VPF

Port size

Pad size(X x Y)(mm)


Port tube dia.

Push-in fitting(mm) φ1.8, φ2, φ3, φ4, φ6
Barb fitting (Tube O.D.xI.D.)(mm) φ3xφ2, φ4xφ2.5, φ6xφ4

Port thread size

Metric female thread M5x0.8, M6x1
Male thread M14x1

Theoretical Suction Force Graph

Type & Price list

The followings are list of the most common models.
For other models, please refer to Vacuum Pad Model Code Search or the digital catalog.

Pad rubber only, Pad & Screw set

Pad+Holder (Fixed type) set

Pad+Holder (Screwed type) set

Pad+Holder (Spring type) set

Pad+Holder (Direct mount, Spring type) set

Detailed Safety Instructions


1.When installing the pad frame, check the configuration diagram of the oval pad, use a tool that does not damage the frame, and tighten with a torque of 0.27 to 0.33 Nm, and make sure there is no loosening.


1.The adapter for oval pad is not conductive. When using a vacuum pad made of a conductive material, take measures to allow electricity to escape directly from the pad rubber.

Inquiries about this product

It is also possible to suggest products suitable for various conditions such as applications and functions. Please feel free to contact us or visit the nearest sales office.

The following are frequently asked questions. Please check before making inquiries.