Vacuum Pad
Vacuum Suction Cup Oval Type
Best suitable for substrate or long work like semiconductor.
Options
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No copper-based metallic material is used in flow paths
-
HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.
Advantages
Best suitable for substrate or long work like semiconductor.
Best suitable for substrate or long work like semiconductor.
Wide selection of pad sizes, materials and holder types.
Pad size:13sizes.
Pad material:9types.
Holder type:14types.
Stroke length of spring type holder can be selected.
Conventional long stroke holder (with cover) is integrated into VPC or VPD.
Stroke:6, 10, 15 and 20mm
Conventional long stroke holder (without cover) is renewed as VPOC or VPOD.
Stroke:20, 30, 40 and 50mm
Low dust emission type is newly introduced for spring type holder.
Lower dust emission compared to conventional spring type holder.
Noise level:Realizing low noise with 45dB.
Connectable to all pad sizes.
Stroke:5, 10, 15mm are available.
The pad holder requiring for applications of "No copper alloy" and "Low-level ozone resistance" is available.
-S3 spec.:Non copper alloy is used for metal parts and HNBR or FKM is used for seal materials.
DLC. coating type prevents pads from sticking to the workpieces thanks to a special coating on the surface of the vacuum pad.
DLC. coating type significantly improves slipperiness. Effective in reducing suction marks and preventing sticking of lightweight and thin work-pieces.
Reduces suction marks by surface reforming of nitrile rubber with chemicals.
Reduced suction marks thanks to surface modification with environmentally friendly chemicals.
ワークへの吸着痕を軽減する「パッド表面特殊処理」をオプションで追加！
Specifications
Pad material
| Material | Nitrile rubber, Silicone rubber, Urethane rubber, Fluoro rubber, Conductive silicone rubber, Conductive butadiene rubber (Low resistance), Conductive NBR (Low resistance), HNBR, EPDM |
|---|
*1. The Conductive silicone rubber is a silicon rubber capable of releasing static electricity. (Volume resistance:105Ω·cm or less)
*2. The material of Conductive butadiene rubber (low resistance) is a butadiene rubber (Volume resistance:200Ω·cm or less)
*3. Pad size 2x4 and 3.5x7mm are not available with Conductive butadiene rubber (Low resistance type). Pad size 4x30mm is not available with Urethane rubber (U) and Fluoro rubber (F).
*4. The material of Conductive NBR (low resistance) is a nitrile rubber (Volume resistance:200Ω·cm or less)
*5. Nitrile rubber (N) and Conductive NBR (Low resistance) (NE) are not suitable for use with ozone environment.
Holder type
| Fixed type, Top port | VPMA(Mini)/VPA(Standard) |
|---|---|
| Fixed type, Side port | VPMB(Mini)/VPB(Standard) |
| Spring type, Top port | VPMC(Mini)/VPC(Standard)/VPOC(No cover)/VPLFC(Low dust emission) |
| Spring type, Side port | VPMD(Mini)/VPD(Standard)/VPOD(No cover) |
| Spring type, Direct mount | VPF |
Port size
Pad size(X x Y)(mm)
| Pad size | 2x4, 3.5x7, 4x10, 4x20, 4x30, 5x10, 5x20, 5x30, 6x10, 6x20, 6x30, 8x20, 8x30 |
|---|
Port tube dia.
| Push-in fitting(mm) | φ1.8, φ2, φ3, φ4, φ6 |
|---|---|
| Barb fitting (Tube O.D.xI.D.)(mm) | φ3xφ2, φ4xφ2.5, φ6xφ4 |
Port thread size
| Metric female thread | M5x0.8, M6x1 |
|---|---|
| Male thread | M14x1 |
Theoretical Suction Force Graph
Construction
Type & Price list
The followings are list of the most common models.
For other models, please refer to Vacuum Pad Model Code Search or the digital catalog.
Pad rubber only, Pad & Screw set
Pad+Holder (Fixed type) set
Pad+Holder (Screwed type) set
Pad+Holder (Spring type) set
Pad+Holder (Direct mount, Spring type) set
Detailed Safety Instructions
Warning
1.When installing the pad frame, check the configuration diagram of the oval pad, use a tool that does not damage the frame, and tighten with a torque of 0.27 to 0.33 Nm, and make sure there is no loosening.
Caution
1.The adapter for oval pad is not conductive. When using a vacuum pad made of a conductive material, take measures to allow electricity to escape directly from the pad rubber.
Inquiries about this product
It is also possible to suggest products suitable for various conditions such as applications and functions. Please feel free to contact us or visit the nearest sales office.
The following are frequently asked questions. Please check before making inquiries.
