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External Vacuum Controller

Pressure adjusting function is added to conventional blow-off flow adjusting function.
It enables to prevent works from being blown away.

Fluid medium
Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range
0.3~0.7MPa
Working vacuum range
-100~0kPa
Operating temp. range
5~50℃ (No freezing)
Operating humidity range
35~85%RH (No dew condensation)
Vibration/Impact resistance
Max. 50m/s2 / Max. 150m/s2
Protective structure
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05MPa
Proof pressure (Vacuum circuit)
0.2MPa

Corresponding product

  • No copper-based metal is used for the metal material. *Some products are only compatible in the flow path.
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.

External Vacuum Controller

The response characteristics of supply valve is maximized to realize a high-cycle vacuum system.

Fluid medium
Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range
0.3~0.7MPa
Working vacuum range
-100~0kPa
Operating temp. range
5~50℃ (No freezing)
Operating humidity range
35~85%RH (No dew condensation)
Vibration/Impact resistance
Max. 50m/s2 / Max. 150m/s2
Protective structure
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05MPa
Proof pressure (Vacuum circuit)
0.2MPa

Corresponding product

  • No copper-based metal is used for the metal material. *Some products are only compatible in the flow path.
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.

External Vacuum Controller

31.5mm wide vacuum unit is designed to optimize the control of large vacuum flows.

Fluid medium
Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range
0.3~0.7MPa
Working vacuum range
-100~0kPa
Operating temp. range
5~50℃ (No freezing)
Operating humidity range
35~85%RH (No dew condensation)
Vibration/Impact resistance
Max. 50m/s2 / Max. 150m/s2
Protective structure
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05MPa
Proof pressure (Vacuum circuit)
0.2MPa

Corresponding product

  • No copper-based metal is used for the metal material. *Some products are only compatible in the flow path.
  • HNBR or FKM is used for the seal rubber material. *Some products are only compatible in the flow path.

External Vacuum Controller

Small in size and lightweight. External Vacuum Controller with bundled wiring dedicated to manifold mount.

Fluid medium
Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range
0.3~0.7MPa
Working vacuum range
-100~0kPa
Operating temp. range
5~50℃ (No freezing)
Operating humidity range
35~85%RH (No dew condensation)
Vibration/Impact resistance
Max. 50m/s2 / Max. 150m/s2
Protective structure
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05MPa
Proof pressure (Vacuum circuit)
0.2MPa

External Vacuum Controller

External Vacuum Controller best suitable for the fields requires space-saving and high speed.

Fluid medium
Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range
0~0.55MPa
Working vacuum range
-100~0kPa
Operating temp. range
5~50℃ (No freezing)
Operating humidity range
35~85%RH (No dew condensation)
Vibration/Impact resistance
Max. 50m/s2 / Max. 150m/s2
Protective structure
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05MPa
Proof pressure (Vacuum circuit)
0.2MPa

External Vacuum Controller

Built-in flow sensor type (Industry's first) is added to the lineup. Conventional pressure sensor mount type and no pressure sensor type are also prepared.
Recommendable to semiconductor related equipment (chip mounter and handler) and vacuum transfer equipment for miniature work piece.

Fluid medium
Air (JIS B 8392-1:Class1.2.1~2.4.3 compliant), Vacuum
Operating pressure range
0.3~0.7MPa
Working vacuum range
-90~0kPa
Operating temp. range
5~50℃ (No freezing)
Operating humidity range
35~85%RH (No dew condensation)
Vibration/Impact resistance
Max. 50m/s2 / Max. 150m/s2
Protective structure
Equivalent to IEC IP40
Lubrication
Not required
Proof pressure (Air supply circuit)
1.05MPa
Proof pressure (Vacuum circuit)
0.2MPa